Pad Metric Wafer

A wafer lot has a story before polishing starts. Give that story a clear record with Pad Metric Wafer. Bring product identity, assigned tool and selected recipe together. Keep the planned pad and slurry visible beside the lot. Prepare work details before the first process entry. Follow the lot as polishing activity is recorded. Log the time spent on a processing event. Add slurry consumption using the unit actually entered. Capture removal measurements when readings are available. See a removal rate when the required values are valid. Leave uncertain or missing readings out of calculated rates. Keep each dated activity tied to its original details. Update a lot plan without rewriting earlier event history. Track pad changes among the recorded process events. Review how assigned tools appear across completed entries. Keep unlike slurry units apart in summaries. Attach context with…